Aerospace Instrument-Making Annotation << Back To the evaluation of limiting error of micromechanic gyroscopes and accelerometers V.E. Plekhanov, S.A. Anchutin The approach to an estimation of limiting errors of micromechanical gyroscopes and accelerometers, based on the model considering as sources of errors the thermodynamic noise suspension and noise of capacitive pick-up of a sensitive element is considered. In model the mechanism of jet power influence of noise sources of capacitive pick-up on the sensitive element is considered, at the same time it was shown, that on the limiting error significant influence renders the voltage submitted on electrodes of capacitive pickup which size can be optimized. Character of change of limiting errors in function of overall dimensions of micromechanical sensors is shown.