Aerospace Instrument-Making Annotation << Back Development of micromechanical sensors’ functional subsystems S.A. Anchutin An approach to development of micromechanical sensors’ functional subsystems based on use of composite analysis methods is considered. Examples of application numeric and analytical analysis of different subsystems of micro-accelerometer, micro-gyroscopes and micro-mirror are featured. The fact is shown that labor intensiveness is reduced when using composite method of analysis (likewise reduced order modeling) and high accuracy is achieved.