Aerospace Instrument-Making Annotation << Back GAS ENVIRON IMPACT ON A VIBRATING MEMS GYROSCOPE PERFORMANCE A.N. Kostornoy This paper studies gas damping effect on the performance and quality factor of a micromechanical ring gyro. Dependences of resonance frequency and frequency split from internal pressure were found out. The effect of different excitation voltage levels on device performance characteristics is shown. Tests on MEMS gyroscope accuracy evaluation were carried out. Key words: vacuum, MEMS, quality factor. Contacts: E-mail: itt@inertech.ru Pp. 03-11.