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Aerospace Instrument-Making

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SETTING NATURAL RESONANT FREQUENCY OF THE MEMS VIBRATION RING RESONATOR GYRO
A.N. Kostornoy, S.F. Konovalov

The error, which leads to splitting of the frequencies of two oscillation modes, has been indicated in this work. The balancing process has been described, also technique works has been developed. On this basis, flowchart has been developed and the installation for the balancing has been designed. Experimental laser works on the removal mass from the surface of the ring have been held. This works are needed to combine natural resonance frequencies of the
ring resonator MEMS.
Key words: MEMS Vibrating Ring Gyroscope, tuning frequency, equipment, removal of masses.

Contacts: E-mail: itt@inertech.ru, E-mail: sercon@bk.ru

Pp. 03-11.

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