Aerospace Instrument-Making Annotation << Back Constructive opportunities of reduction in MEMS-accelerometer’s temperature errors Konovalov S.F. Маiorov D.V. Podchezertsev V.P. Ponomarev Yu.А. Denisov R.А. Меrkulov V.А. Sivov V.А. Yurmanov S.Yu. In work the analysis of constructive opportunities of reduction in influence on charac-teristics MEMS-accelerometer temperature deformations of a sensitive element. By results of the analysis the design of the device which feature is that a movable vane of pendulum made in the form of a yoke is suspended in the frame of pendulous unit by two cruciform extensions. To reduce the influence of temperature deformations of the pendulous unit frame on the zero signal of accelerometer caused by difference between the thermal coefficients of expansion of silicon and reciprocal plates material the cruciform extensions are fixed in the frame using additional chords. On the insulated surface of pendulous unit vane there are spiral print coils of differential compensation torquer and movable electrodes of capacitive pick off. The paper considers two options to arrange magnetic systems, presents the simulation results of magnetic fields, which enable defining an optimal configuration of magnetic cores and optimal sites for spiral systems. The paper makes known the results of a pilot study to represent the hybrid compensation pendulous accelerometer design. Keywords: accelerometer, silicon flexible suspension, thermal deformations, compensation, shock resis-tance. Contacts: E-mail: maord@beelinewifi.ru Pp. 08-15.